SESHA 2013 Symposium Abstract

Lockout Tagout and Electrical Safe Work Practices for Ion Implanters

Roberge, Steven
(Axcelis Technologies, Inc. )

Ion implanters present a particular challenge in Hazardous Energy Control. Ion implanters utilize a wide variety of hazardous energies including high voltage electricity, highly toxic gases, mechanical systems, vacuum, pneumatic pressure and more. Although interlocks and control systems are incorporated into equipment design to prevent exposure to these hazards, OSHA does not recognize these safety systems and requires the use of hazardous energy isolation at its source (Lockout Tagout). Further complicating Lockout Tagout, is the infeasibility of isolating the main energy sources in the implanter. Some systems must remain operational during access to the equipment for safety purposes, or for troubleshooting or setup operations. For example, high voltage must be locked out while accessing the gas box for a cylinder change operation, however the control systems must remain energized to allow purging of the gas plumbing prior to cylinder removal. Axcelis has developed modular Lockout Tagout procedures for its equipment based on localized hazardous energy analyses conducted in each module of the equipment. In this way, only the hazardous energies that personnel could access during a particular task must be controlled, allowing other systems to remain operational. Troubleshooting activities require personnel to access energized electrical systems for voltage or current measurements. As a component of its Hazardous Energy Control and Electrical Safe Work Practices program, Axcelis has performed Arc Flash Analyses to determine the appropriate level of protective equipment for work in different sectors of the equipment. This presentation will discuss the methods Axcelis has developed to ensure the safety of personnel and comply with regulations governing these activities.